Tīmeklis2013. gada 11. febr. · 如果你使用SF6和C4F8 毫无疑问是bosch etch 技术。. 他本来就是3sec etch step with SF4+ 3sec passivation step with C4F8 组成一个cycle。. 然后5min中里面有大约100个cycle。. 这种事比较先进的pulse技术。. 时间可以调制 意味着etch 和 passivation的强度可以控制 而且2个step之间还可以插入 ... TīmeklisLAM490 Math Independent Study Students conduct in-depth examinations of a topic in mathematics culminating in an interpretive report. Prerequisites: LAM220, consent of instructor. 2-5 quarter hours for Undergraduate Students. National Louis University. Illinois Admissions; Registration ...
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